Carrier head with a flexure

Details Carrier head with a flexure Carrier head with a flexure

2005-02-22

2005-02-22

Hail, III, Joseph J. (Department: 3723)

Abrading

Machine

Rotary tool

C451S041000, C451S177000, C451S285000, C451S286000, C451S287000, C451S364000, C451S397000, C451S398000

Reexamination Certificate

active

06857946

ABSTRACT:
A carrier head for a chemical mechanical polishing apparatus. The carrier head includes a housing, a base, a loading mechanism, a gimbal mechanism, and a substrate backing assembly. The substrate backing assembly includes a support structure positioned below the base, a substantially horizontal, annular flexure connecting the support structure to the base, and a flexible membrane connected to the support structure. The flexible membrane has a mounting surface for a substrate, and extends beneath the base to define a chamber.

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