Abrading – Machine – Rotary tool
Patent
1998-11-25
2000-10-17
Rose, Robert A.
Abrading
Machine
Rotary tool
451398, 451 41, B24B 722
Patent
active
061322989
ABSTRACT:
A carrier head, particularly suited for chemical mechanical polishing of a flatted substrate, includes a flexible membrane and an edge load ring. A lower surface of the flexible membrane provides a receiving surface for a center portion of the substrate, whereas a lower surface of the edge load ring provides a receiving surface for a perimeter portion of the substrate. A slurry suitable for chemical mechanical polishing a flatted substrate includes water, a colloidal silica that tends to agglomerate, and a fumed silica that tends not to agglomerate.
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Chen Hung
Prabhu Gopalakrishna B.
Zuniga Steven
Applied Materials Inc.
Rose Robert A.
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