Carrier head with a layer of conformable material for a chemical

Details Carrier head with a layer of conformable material for a chemical Carrier head with a layer of conformable material for a chemical

1996-10-10

1998-10-13

Rose, Robert A.

Abrading

Machine

Rotary tool

451 41, 451 42, 451285, 451286, 451288, 451289, 451390, 451520, B24B 500

Patent

active

058204482

ABSTRACT:
A carrier head for a chemical mechanical polishing apparatus. The carrier head includes a housing with a recess. A flexible membrane defines an enclosed volume in the recess. A conformable material is disposed in the enclosed volume. The conformable material ensures that any load applied to the substrate is evenly distributed.

REFERENCES:
patent: 5584751 (1996-12-01), Kobayashi et al.
patent: 5593340 (1997-01-01), Nelson et al.
patent: 5605488 (1997-02-01), Ohashi et al.
patent: 5624299 (1997-04-01), Shendon et al.
patent: 5643053 (1997-07-01), Shendon et al.

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