Carrier head with a non-stick membrane

Details Carrier head with a non-stick membrane Carrier head with a non-stick membrane

2006-02-21

2006-02-21

Wilson, Lee D. (Department: 3723)

Abrading

Machine

Rotary tool

C451S289000, C451S388000, C451S398000

Reexamination Certificate

active

07001256

ABSTRACT:
A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base to define a chamber. The flexible membrane has a core of a first material and an outer layer of a second material having a lower adhesion to the substrate than the first material. An exposed surface of the outer layer provides a mounting surface for the substrate.

REFERENCES:
patent: 5624299 (1997-04-01), Shendon
patent: 6056632 (2000-05-01), Mitchel et al.
patent: 6113466 (2000-09-01), Lin
patent: 6165058 (2000-12-01), Zuniga et al.
patent: 6183354 (2001-02-01), Zuniga et al.
patent: 6315649 (2001-11-01), Hu et al.
patent: 6508696 (2003-01-01), Kobayashi et al.
patent: 6627098 (2003-09-01), Custer et al.
Brooks, A., “Surface Enhancement of Elastomers Using a Polymer Film”, Sep. 21-24, 1999, Rubber Division, American Chemical Society, Orlando, Florida, Paper No. 16, pp. 1-8.

Affiliated with

Also associated with

Rating

Carrier head with a non-stick membrane does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Carrier head with a non-stick membrane, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Carrier head with a non-stick membrane will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3648474