Abrading – Machine – Rotary tool
Patent
1997-12-31
1999-11-30
Scherbel, David A.
Abrading
Machine
Rotary tool
451 41, 451398, B24B 2900
Patent
active
059933020
ABSTRACT:
A carrier head for a chemical mechanical polishing apparatus includes a detachable retaining ring which may be used for centering the substrate during substrate loading.
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Chen Hung
Zuniga Steven M.
Applied Materials Inc.
Nguyen Dung Van
Scherbel David A.
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