Silicon carbide substrate, and method for producing the...
Silicon epitaxial wafer and its manufacturing method
Silicon epitaxial wafer and process for manufacturing the same
Silicon epitaxial wafer and production method therefor
Silicon semiconductor crystal and a method for manufacturing it
Silicon wafer and method for manufacturing the same
Simultaneous cyclical deposition in different processing...
Single crystal cutting method
Single crystal silicon carbide thin film fabrication method...
Single crystal silicon layer, its epitaxial growth method...
Single-crystal material on non-single-crystalline substrate
Slicing of single-crystal films using ion implantation
Solid phase epitaxial crystallization of amorphous silicon films
Solid solution wide bandgap semiconductor materials
Solid solution wide bandgap semiconductor materials
Solidification of crystalline silicon from reusable crucible...
Sublimation and purification method
Substituted donor atoms in silicon crystal for quantum computer
Substrate including wide low-defect region for use in...
Substrate processing method and apparatus and SOI substrate