Semiconductor device with air gaps between interconnections and
Semiconductor raised source-drain structure
Semiconductor structure and method of manufacture
Semiconductor structure and method of manufacture
Semiconductor structure with a dielectric layer and its...
Stacked devices
STI process
Stress relaxation in dielectric before metalization
Sub-lithographic dimensioned air gap formation and related...
Technique to obtain high mobility channels in MOS...
Trench etching in an integrated-circuit semiconductor device
Trench isolation process