4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
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Multiple nitrogen plasma treatments for thin SiON dielectrics

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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Multistep cure technique for spin-on-glass films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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