Fluorine-containing base layer for multi-layer resist processes
Fluorine-containing composition for forming anti-reflection film
Fluorine-containing compound, resist composition for...
Fluorine-containing compound, resist composition for...
Fluorine-containing copolymers and carriers for developing elect
Fluorine-containing cyclic compound, fluorine-containing...
Fluorine-containing epoxy resin composition, and surface...
Fluorine-containing ethylenic monomer having hydroxyl group...
Fluorine-containing graft copolymer and toner using the same
Fluorine-containing layers for damascene structures
Fluorine-containing photoresist having reactive anchors for...
Fluorine-containing photosensitive polymer having hydrate...
Fluorine-containing polymer having acid-reactive group and...
Fluorine-containing silicon compounds, silicone resins,...
Fluorine-containing styrene acrylate copolymers and use...
Fluorine-free heteroaromatic photoacid generators and...
Fluorine-free titanocenes and the use thereof
Fluorine-passivated reticles for use in lithography and...
Fluoro-containing photosensitive polymer and photoresist...
Fluoroaliphatic group-containing copolymer