Fluorine-containing cyclic compound, fluorine-containing...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

Reexamination Certificate

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C568S812000, C568S826000, C526S245000, C430S322000

Reexamination Certificate

active

07736835

ABSTRACT:
The present invention relates to, for example, a fluorine-containing cyclic compound represented by the following general formula (1).In the general formula (1), R1a is a C1-C25cyclic alkyl group, cyclic alkenyl group or cyclic alkynyl group; each of R2 and R3 is independently a hydrogen atom, a halogen atom, or a C1-C25straight-chain, branched or cyclic alkyl group; and each of R1a, R2 and R3 may contain fluorine atom, oxygen atom, sulfur atom, nitrogen atom or an atomic group containing a carbon-carbon double bond.

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