Use of partially fluorinated polymers in applications...

Details Use of partially fluorinated polymers in applications... Use of partially fluorinated polymers in applications...

2002-05-14

2008-10-21

Kelly, Cynthia H. (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

C526S242000, C526S247000, C526S250000, C526S255000, C526S266000, C526S270000, C355S018000, C355S077000

Reexamination Certificate

active

07438995

ABSTRACT:
Disclosed are partially fluorinated and fully fluorinated polymers that are substantially transparent to ultraviolet radiation at wavelengths from approximately 150 nanometer to 260 nanometers.

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L. F. Thompson, C. G. Wilson, and M. J. Bowden, Introduction to Microlithography, Second Edition, American Chemical Society, Washington, DC 1994.
International Search Report for PCT/US02/18392 dated Oct. 1, 2002.

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