Use of soft adhesive to attach pellicle to reticle

Details Use of soft adhesive to attach pellicle to reticle Use of soft adhesive to attach pellicle to reticle

2011-03-08

2011-03-08

Rosasco, Stephen (Department: 1721)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

Reexamination Certificate

active

07901847

ABSTRACT:
A pellicle is attached to a reticle by a soft adhesive. The distortion of the reticle is less than if a hard adhesive were used.

REFERENCES:
patent: 6303196 (2001-10-01), Funatsu
patent: 6627365 (2003-09-01), Shiraishi
patent: 6795170 (2004-09-01), Mishiro et al.
patent: 2004/0200572 (2004-10-01), Tejnil et al.
patent: 2006/0033905 (2006-02-01), Toofan et al.
patent: 2008/0213679 (2008-09-01), Miyakawa et al.
U.S. Appl. No. 12/060,220, filed Mar. 31, 2008.

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