Using perfluoropoly-ethers to form pellicles

Details Using perfluoropoly-ethers to form pellicles Using perfluoropoly-ethers to form pellicles

2007-05-08

2007-05-08

Young, Christopher G. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

C156S272200, C428S014000, C428S421000, C428S422000

Reexamination Certificate

active

10289611

ABSTRACT:
Exposure systems may use pellicles made of perfluoropoly-ether. These materials may exhibit reduced darkening upon repeated exposures compared to other materials.

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patent: 6280885 (2001-08-01), Gordon
patent: 6770404 (2004-08-01), Wheland et al.
patent: 7022437 (2006-04-01), Cummings

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