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Method for improved lithographic critical dimension control

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method for improved lithographic patterning utilizing...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method for increasing productivity without resolution loss on im

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method for making partial full-wafer pattern for charged...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method for manufacturing a mold having an embossed cavity surfac

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method for manufacturing half-tone printing plates

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method for manufacturing memory devices

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method for measuring aberration of projection lens, method...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method for measuring gap between mask and substrate of...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method for measuring reticle leveling in stepper

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method for monitoring a reticle

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method for monitoring dosage/focus/leveling

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method for monitoring photoresist latent images

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method for monitoring photoresist latent images

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method for multiple process parameter matching

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method for OPC model generation

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method for optimization of image reproduction processes

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method for optimizing tabular grain population of silver halide

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method for patterning semiconductors through adjustment of...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method for preparation of a color proof from a set of color sepa

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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