4. Radiant energy
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Illumination system

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent

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Illumination system

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent

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Illumination system calibration and operation having a...

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate

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Illumination system for electron beam lithography tool

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Illumination system for material testing apparatus

Radiant energy – Ionic separation or analysis – Static field-type ion path-bending selecting means
Patent

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Illumination system for nonemissive electronic displays

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Reexamination Certificate

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Illumination system for shaping extreme ultraviolet...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Illumination system having a light-transmissive plate with...

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Reexamination Certificate

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Illumination system having a nested collector for annular...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Illumination system having a plurality of movable sources

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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Illumination system in a scanning electron microscope

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Illumination system particularly for microlithography

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Illumination system particularly for microlithography

Radiant energy – Invisible radiant energy responsive electric signalling – With or including a luminophor
Reexamination Certificate

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Illumination system particularly for microlithography

Radiant energy – Invisible radiant energy responsive electric signalling – With or including a luminophor
Reexamination Certificate

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Illumination system particularly for microlithography

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Illumination system particularly for microlithography

Radiant energy – Invisible radiant energy responsive electric signalling – With or including a luminophor
Reexamination Certificate

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Illumination system particularly for microlithography

Radiant energy – Irradiation of objects or material
Reexamination Certificate

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Illumination system that suppresses debris from a light source

Radiant energy – Luminophor irradiation – With ultraviolet source
Reexamination Certificate

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Illumination system with a plurality of light sources

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Illumination system with a plurality of light sources

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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