Radiant energy – Luminophor irradiation – With ultraviolet source
Reexamination Certificate
2005-08-09
2005-08-09
Font, Frank G. (Department: 2883)
Radiant energy
Luminophor irradiation
With ultraviolet source
C250S458100, C250S492200, C250S492100, C250S492220, C250S50400H
Reexamination Certificate
active
06927403
ABSTRACT:
There is provided an illumination system for wavelengths of ≦193 nm. The illumination system includes an object plane, a plane conjugated to the object plane, a first collector between the object plane and the conjugated plane, and a second collector after the conjugated plane. The first collector focuses a beam bundle of rays from the object plane in the conjugated plane. At least one of the first and second collectors includes a mirror shell. The rays strike the mirror shell at an angle of incidence of less than 20° relative to a surface tangent of the mirror shell.
REFERENCES:
patent: 4688932 (1987-08-01), Suzuki
patent: 5071240 (1991-12-01), Ichihara et al.
patent: 5715084 (1998-02-01), Takahashi et al.
patent: 5763930 (1998-06-01), Partlo
patent: 5768339 (1998-06-01), O'Hara
patent: 5796524 (1998-08-01), Oomura
patent: 5805356 (1998-09-01), Chiba
patent: 6064072 (2000-05-01), Partlo et al.
patent: 6198793 (2001-03-01), Schultz et al.
patent: 6229647 (2001-05-01), Takahashi et al.
patent: 6438199 (2002-08-01), Schultz et al.
patent: 6452661 (2002-09-01), Komatsuda
patent: 6498315 (2002-12-01), Betz et al.
patent: 6498351 (2002-12-01), Kruizinga et al.
patent: 6583937 (2003-06-01), Wangler et al.
patent: RE38438 (2004-02-01), Takahashi
patent: 3001059 (1983-04-01), None
patent: 0939341 (1999-09-01), None
patent: 0 987 601 (2000-03-01), None
patent: 1 004 937 (2000-05-01), None
patent: 1035445 (2000-09-01), None
patent: 0 987 601 (2001-10-01), None
patent: WO 99/27542 (1999-06-01), None
patent: WO 00/63922 (2000-10-01), None
patent: WO 01/08162 (2001-02-01), None
Antoni Martin
Banine Vadim Yevgenyevich
Egle Wilhelm
Loopstra Erik Roelof
Singer Wolfgang
ASML Lithography B.V.
Carl Zeiss SMT AG
El-Shammaa Mary
Font Frank G.
Ohlandt Greeley Ruggiero & Perle LLP
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