Ion energy analyzer and methods of manufacturing and operating

Irradiating device with an electronic accelerator

Large area, pico-second resolution, time of flight detectors

Lithography system, sensor and measuring method

Luminous body, electron beam detector using the same,...

Mass spectrometer

Measuring momentum for charged particle tomography

Method and apparatus for determining beam parallelism and...

Method and apparatus for imaging through 3-dimensional...

Method and apparatus for ion beam centroid location

Method and device for setting and correcting errors of an electr

Method for measuring the intensity profile of an electron...

Method for monitoring absorbed dose in an electron beam

Method of acquiring offset deflection amount for shaped beam...

Method of compensation for electron beam dose

Method of correcting chromatic aberrations in...

Methods and apparatus for beam density measurement in two...

Methods and apparatus for ion beam angle measurement in two...

Methods and apparatus for ion beam angle measurement in two...

Methods and apparatus for mounting an X-ray detecting unit...