Radiant energy – With charged particle beam deflection or focussing – With detector
Reexamination Certificate
2007-04-10
2007-04-10
Wells, Nikita (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
With detector
C250S492210
Reexamination Certificate
active
11099119
ABSTRACT:
An angle measurement system for an ion beam includes a flag defining first and second features, wherein the second feature has a variable spacing from the first feature, a mechanism to translate the flag along a translation path so that the flag intercepts at least a portion of the ion beam, and a sensing device to detect the ion beam for different flag positions along the translation path and produce a sensor signal having a first signal component representative of the first feature and a second signal component representative of the second feature. The first and second signal components and corresponding positions of the flag are representative of an angle of the ion beam in a direction orthogonal to the translation path. The sensing device may be a two-dimensional array of beam current sensors. The system may provide measurements of horizontal and vertical beam angles while translating the flag in only one direction.
REFERENCES:
patent: 2004/0195528 (2004-10-01), Reece et al.
Hermanson Eric D.
Mollica Rosario
Murphy Paul J.
Olson Joseph C.
Hashmi Zia R.
Varian Semiconductor Equipment Associates, Inc.
Wells Nikita
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