Radiant energy – With charged particle beam deflection or focussing – With detector
Reexamination Certificate
2006-06-29
2008-11-18
Philogene, Haissa (Department: 2821)
Radiant energy
With charged particle beam deflection or focussing
With detector
C250S492210, C250S491100, C427S523000, C362S284000, C362S324000, C353S097000
Reexamination Certificate
active
07453070
ABSTRACT:
A beam density measurement system includes a shield, a beam sensor, and an actuator. The beam sensor is positioned downstream from the shield in a direction of travel of a beam. The beam sensor is configured to sense an intensity of the beam, and the beam sensor has a long dimension and a short dimension. The actuator translates the shield relative to the beam sensor, wherein the shield blocks at least a portion of the beam from the beam sensor as the shield is translated relative to the beam sensor, and wherein measured values of the intensity associated with changes in a position of the shield relative to the beam sensor are representative of a beam density distribution of the beam in a first direction defined by the long dimension of the beam sensor.
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Gupta Atul
Norris Gregg A.
Olson Joseph C.
Philogene Haissa
Varian Semiconductor Associates, Inc.
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