Radiant energy – With charged particle beam deflection or focussing – With detector
Patent
1986-11-24
1988-02-09
Anderson, Bruce C.
Radiant energy
With charged particle beam deflection or focussing
With detector
250396R, 324 713, H01J 3704
Patent
active
047243244
ABSTRACT:
Method and apparatus for locating the centroid along a line section of an ion beam in a vacuum chamber, requiring no moving parts and requiring only two electrical conductors passing through the wall of the vacuum chamber. An array of Faraday cup current sensors is positioned along a line in the path of the beam at predetermined distances from a reference point, so that each sensor intercepts a component of the beam. A first plurality of resistors each has one end connected to one of the beam current sensors, has a value proportional to the distance between the beam current sensor to which it is connected and the reference point, and has its other end connected to a first common point. A second plurality of resistors having values equal to each other each has one end connected to one of the beam current sensors, has a value much greater than the largest of the first plurality of resistors, and has its other end connected to a second common point. The first and second common points are connected through the wall of the vacuum chamber to a divider. The current supplied to the second common point is divided by the current supplied to the first common point to provide the distance between the reference point and the projected centroid of the ion beam.
REFERENCES:
patent: 3612858 (1971-10-01), Parry
patent: 3749963 (1973-07-01), Fredrickson et al.
patent: 3925640 (1976-08-01), Boox et al.
patent: 4290012 (1981-09-01), Berte et al.
patent: 4608493 (1986-08-01), Hzyafuji
W. N. Hammer et al, "A Technique for Measuring, Displaying, Recording, and Modifying the Spatial Uniformity of Implanted Ions," Journal of Applied Physics, vol. 47, No. 5, May 1976, pp. 2161-2164.
N. Natsuaki et al, "Spatial Dose Uniformity Monitor for Electrically Scanned Beam," Review of Scientific Instruments, 49(9), Sep. 1978, pp. 1300-1304.
Anderson Bruce C.
Cole Stanley Z.
Dooher Terrence E.
Fisher Gerald M.
Guss Paul A.
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