Luminous body, electron beam detector using the same,...

Details Luminous body, electron beam detector using the same,... Luminous body, electron beam detector using the same,...

2011-03-22

2011-03-22

Souw, Bernard E (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

With detector

C250S283000, C250S310000, C250S311000, C250S399000, C250S492200, C257S010000, C257S290000

Reexamination Certificate

active

07910895

ABSTRACT:
A light-emitting body of rapid speed of response and high light emission intensity, and an electron beam detector, scanning electron microscope and mass spectroscope using this are provided. In the light-emitting body10according to the present invention, when fluorescence is emitted by a nitride semiconductor layer14formed on one face12aof a substrate12in response to incidence of electrons, at least some of this fluorescence is transmitted through this substrate12, whereby that fluorescence is emitted from the other face12bof the substrate. The response speed of this fluorescence is not more than μsec order. Also, the intensity of emission of this fluorescence is almost identical to that of a conventional P47 phosphor. Specifically, with this light-emitting body10, a response speed and light emission intensity are obtained that are fully satisfactory for application to a scanning electron microscope or mass spectroscope. In addition, a cap layer16contributes to improvement in the persistence rate of light emission in the nitride semiconductor layer14, so, with this light-emitting body10, not only high-speed response and high light emission intensity are obtained, but also an excellent persistence rate.

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