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Method and apparatus for destruction of undesired vegetation usi

Radiant energy – Irradiation of objects or material
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Method and apparatus for detecting edge of fine pattern on speci

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method and apparatus for detecting particles in ion implantation

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method and apparatus for detecting that two moveable members...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method and apparatus for directing electron radiation to subcuta

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Method and apparatus for drawing patterns using an energy beam

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method and apparatus for electron beam alignment with a member b

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method and apparatus for electron beam lithography

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method and apparatus for electron beam processing of substrates

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Method and apparatus for electron-beam lithography

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method and apparatus for emission lithography using...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method and apparatus for exposing multi-level registered pattern

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method and apparatus for exposing multi-level registered pattern

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method and apparatus for fabricating a device/circuit pattern by

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method and apparatus for fabricating and trimming optical...

Radiant energy – Irradiation of objects or material
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Method and apparatus for fingerprint detection and analysis

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Method and apparatus for forming a curved polyline on a...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method and apparatus for forming a plurality of tracks in a flex

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Method and apparatus for forming film by ion beam

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method and apparatus for forming optical elements by...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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