Method and apparatus for forming a plurality of tracks in a flex

Details Method and apparatus for forming a plurality of tracks in a flex Method and apparatus for forming a plurality of tracks in a flex

1994-04-12

1995-09-12

Berman, Jack I.

Radiant energy

Irradiation of objects or material

Ion or electron beam irradiation

250400, H01J 2700

Patent

active

054499178

ABSTRACT:
The present invention features methods and apparatus for forming a plurality of tracks in a foil or film with high-energy charged particles by forming layers.

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