Methods and apparatus for glitch recovery in stationary-beam...

Methods and apparatus for glitch recovery in stationary-beam...

Methods and apparatus for ion beam neutralization in magnets

Methods and apparatus for off-axis lithographic illumination

Methods and apparatus for operating high energy accelerator...

Methods and apparatus for precise measurement of time delay...

Methods and apparatus for scanned beam uniformity adjustment...

Methods and apparatuses for off-axis lithographic illumination

Methods and devices for controlling blur resulting from the...

Methods and devices for detecting and canceling magnetic...

Methods and devices for evaluating beam blur in a...

Methods and devices for evaluating beam blur in subfields...

Methods and processing systems for using a gas cluster ion...

Methods and systems for optimizing ion implantation...

Methods for calculating cumulative dose of exposure energy...

Methods for concealing surface defects

Methods for determining a pattern on a microlithography...

Methods for modifying features of a workpiece using a gas...

Methods for reducing blur and variation in blur in projected...

Methods for the automated testing of reticle feature geometries