Methods and devices for controlling blur resulting from the...

Details Methods and devices for controlling blur resulting from the... Methods and devices for controlling blur resulting from the...

2005-07-12

2005-07-12

Wells, Nikita (Department: 2883)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492200

Reexamination Certificate

active

06917048

ABSTRACT:
Methods and devices are disclosed for controlling blur resulting from the space-charge effect and geometrical aberration in a charged-particle-beam microlithography apparatus. Based on the pattern-element densities of the exposure units to be transferred to the substrate, a relationship between the total blur and the beam semi-angle, the current density, and/or the beam-acceleration voltage is determined. An optimal beam semi-angle, current density, and/or beam-acceleration voltage is calculated to: (1) minimize the blur during the transfer-exposure of an exposure unit having a certain pattern-element density; (2) make the blur constant during the transfer-exposure of a group of exposure units having various pattern-element densities; or (3) maximize the patterned-beam current during the transfer-exposure of an exposure unit having a certain pattern-element density and blur tolerance. The beam semi-angle, current density, and/or acceleration voltage of the CPB-optical system is then adjusted to the calculated value.

REFERENCES:
patent: 4451738 (1984-05-01), Smith
patent: 6066853 (2000-05-01), Nakasuji
patent: 6323500 (2001-11-01), Yamashita
patent: 6441384 (2002-08-01), Kojima
patent: 6630681 (2003-10-01), Kojima
patent: 08-017710 (1996-01-01), None
patent: 10-289851 (1998-10-01), None
patent: 2000-12620 (2001-07-01), None
U.S. Appl. No. 10/170,040, filed Jun. 11, 2002, Shimizu et al.

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