Methods and processing systems for using a gas cluster ion...

Details Methods and processing systems for using a gas cluster ion... Methods and processing systems for using a gas cluster ion...

2007-03-30

2009-06-23

Souw, Bernard E (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492300, C204S192100, C204S192300, C204S192340, C257S583000

Reexamination Certificate

active

07550749

ABSTRACT:
Embodiments of an apparatus and methods for offsetting systematic non-uniformities using a gas cluster ion beam are generally described herein. Other embodiments may be described and claimed.

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