Methods for modifying features of a workpiece using a gas...

Details Methods for modifying features of a workpiece using a gas... Methods for modifying features of a workpiece using a gas...

2007-09-05

2009-12-01

Souw, Bernard E (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492300, C257SE21583, C204S192300, C204S192100, C204S192340, C204S298040, C204S298360, C427S534000, C118S7230CB, C216S066000

Reexamination Certificate

active

07626183

ABSTRACT:
Embodiments of methods of modifying surface features on a workpiece with a gas cluster ion beam are generally described herein. Other embodiments may be described and claimed.

REFERENCES:
patent: 6537606 (2003-03-01), Allen et al.
patent: 6750460 (2004-06-01), Greer
patent: 7550748 (2009-06-01), Caliendo et al.
patent: 7550749 (2009-06-01), Caliendo et al.
patent: 2007/0077499 (2007-04-01), Ikuta et al.
patent: 2008/0142480 (2008-06-01), Otsuka
patent: 2009/0057574 (2009-03-01), Wagner et al.

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