Compact, selfshielded electron beam processing technique for thr

Compensated scan wave form generator for ion implantation equipm

Composite system of scanning electron microscope and focused...

Computer controlled collimator changer

Configuration management and retrieval system for proton...

Deflection lens device for electron beam lithography

Device and method for electron beam irradiation

Device and method for locally resolved control of a...

Device and method for milling of material using ions

Device fabrication methods using charged-particle-beam...

Device for irradiating a target with a hadron-charged beam,...

Device for irradiating a tumor tissue

Device for irradiating tumour tissue in a patient with a...

Device for removing the gaseous laminar boundary layer of a web

Device for shielding of x-rays in electron bombardment of materi

Device for the irradiation of a product on both faces

Device to irradiate surfaces with electrons

Dual beam system

Electric charged particle beam microscopy, electric charged...

Electrical probing of SOI circuits