Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Patent
1988-06-03
1989-07-25
Berman, Jack I.
Radiant energy
Irradiation of objects or material
Ion or electron beam irradiation
250398, 250396R, H01J 31302
Patent
active
048516937
ABSTRACT:
A scan controller for an ion implantation system includes a compensation circuit for generating a scanning signal from a triangle voltage signal. The scanning signal causes an ion beam to be deflected so that, in the variety of geometries describing the orientation of the target in the implantation system, the position of the intersection of the ion beam with the planar target surface changes linearly with time. In one embodiment the scanning signal has the form v(t)=-d -e/(t+c). In other embodiments the compensation circuit approximates the above function by means of polynomials.
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Berman Jack I.
Cole Stanley Z.
Dooher Terrence E.
Varian Associates Inc.
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