Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate
2006-11-07
2006-11-07
Berman, Jack (Department: 2881)
Radiant energy
Irradiation of objects or material
Ion or electron beam irradiation
C250S492200, C250S309000, C250S311000, C250S397000, C250S458100, C204S192340, C204S298360, C216S066000, C216S094000, C216S062000
Reexamination Certificate
active
07132673
ABSTRACT:
A milling device is disclosed for the preparation of microscopy specimens or other surface science applications through the use of ion bombardment. The device provides the ability to utilize both gross and fine modification of the specimen surface through the use of high and low energy ion sources. Precise control of the location of the specimen within the impingement beams created by the ion sources provides the ability to tilt and rotate the specimen with respect thereto. Locational control also permits the translocation of the specimen between the various sources under programmatic control and under consistent vacuum conditions. A load lock mechanism is also provided to permit the introduction of specimens into the device without loss of vacuum and with the ability to return the specimen to ambient temperature during such load and unload operation. The specimen may be observed and imaged during all active phases of operation.
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patent: 5104684 (1992-04-01), Tao et al.
patent: 6730237 (2004-05-01), Sievers et al.
patent: 2005/0103746 (2005-05-01), Nadeau et al.
Model 1010 Ion Mill, E.A. Fischione Instruments, Inc., downloaded from www.fischione.com.
Model 1010 Ion Mill, Tabletop precision ion milling and polishing system, E.A. Fischione Instruments, Inc., Part No. 009-1302, Rev. 0.
691 Precision Ion Polishing System (PIPS™), Gatan, Inc., downloaded from www.gatan.com.
Model 691 Precision Ion Polishing System, Gatan Inc.
Fischione Paul E.
Martin David
Matesa Joseph M.
Scheinfein Michael R.
Smith David W.
Berman Jack
E.A. Fischione Instruments, Inc.
Friedman Barry I.
Hashmi Zia R.
Metz Lewis LLC
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