Composite system of scanning electron microscope and focused...

Details Composite system of scanning electron microscope and focused... Composite system of scanning electron microscope and focused...

2006-12-26

2006-12-26

Wells, Nikita (Department: 2881)

Radiant energy

Irradiation of objects or material

Ion or electron beam irradiation

C250S492210, C250S311000

Reexamination Certificate

active

07154106

ABSTRACT:
A composite system of a scanning electron microscope (SEM) and a focused ion beam apparatus (FIB) has an FIB lens barrel for irradiating a focused ion beam to an irradiating position on a sample surface and an SEM lens barrel for observing a machining state of the machined sample surface. The FIB lens barrel has an aperture defining at least one slit of a preselected pattern so that during irradiation of the sample surface with the focused ion beam, the aperture is irradiated by the focused ion beam with a width covering the slit to thereby machine the sample surface in the form of the preselected pattern of the slit.

REFERENCES:
patent: 2005/0184252 (2005-08-01), Ogawa et al.

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