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Systems and methods for a gas field ion microscope

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Reexamination Certificate

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Systems and methods for reducing alteration of a specimen...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Systems and methods for reducing alteration of a specimen...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Systems configured to reduce distortion of a resist during a...

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate

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