Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate
2007-12-04
2007-12-04
Berman, Jack I. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
C250S443100, C250S397000, C250S306000, C250S310000, C356S036000
Reexamination Certificate
active
11215745
ABSTRACT:
Various systems configured to reduce distortion of a resist during a metrology process are provided. The systems include an electron beam metrology tool configured to measure one or more characteristics of one or more resist features formed on a specimen. The electron beam metrology tool may be configured as a scanning electron microscope. The resist may be designed for exposure at a wavelength of about 193 nm. One system includes a cooling subsystem configured to alter a temperature of the specimen during measurements by the tool such that the resist feature(s) are not substantially distorted during the measurements. Another system includes a drying subsystem that is configured to reduce moisture proximate the specimen during measurements by the electron beam metrology tool such that the resist feature(s) are not substantially distorted during the measurements. An additional system may include both the cooling subsystem and the drying subsystem.
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Borowicz Mark
Chuang Tzu Chin
Garcia Rudy F.
Marchman Herschel
Nasser-Ghodsi Muhran
Baker & McKenzie LLP
Berman Jack I.
Hashmi Zia R.
KLA-Tencor Technologies Corp.
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