Systems and methods for a gas field ion microscope

Details Systems and methods for a gas field ion microscope Systems and methods for a gas field ion microscope

2006-03-20

2009-10-13

Nguyen, Kiet T (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

Reexamination Certificate

active

07601953

ABSTRACT:
In one aspect the invention provides a gas field ion microscope that includes an ion source in connection with an optical column, such that an ion beam generated at the ion source travels through the optical column and impinges on a sample. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the invention provides methods for using the ion microscope to analyze samples and enhancing the performance of a gas field ion source.

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