Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2008-07-01
2008-07-01
Berman, Jack I. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S492200, C250S307000, C250S306000, C250S288000, C118S725000, C118S719000, C438S758000, C438S708000, C216S062000
Reexamination Certificate
active
11185915
ABSTRACT:
Systems and methods for reducing alteration of a specimen during by charged particle based and other measurements systems are provided. One system configured to reduce alteration of a specimen during analysis includes a vacuum chamber in which the specimen is disposed during the analysis and an element disposed within the vacuum chamber. A surface of the element is cooled such that molecules in the vacuum chamber are adsorbed onto the surface and cannot cause alteration of a characteristic of the specimen during the analysis. One system configured to analyze a specimen includes an analysis subsystem configured to analyze the specimen while the specimen is disposed in a vacuum chamber and an element disposed within the vacuum chamber. A surface of the element is cooled such that molecules in the vacuum chamber are adsorbed onto the surface and cannot cause alteration of a characteristic of the specimen during the analysis.
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Soltz David
Toth Gabor
Wieczorek Paul
Zuo Aaron
Baker & McKenzie LLP
Berman Jack I.
Hashmi Zia
KLA-Tencor Technologies Corp.
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