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Use of ellipsometry and surface plasmon resonance in...

Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate

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Use of fiducial marks for improved blank wafer defect review

Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent

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Use of laser reflection pickup unit for detection of small...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Use of light scattering particles in design, manufacture,...

Optics: measuring and testing – By particle light scattering – With photocell detection
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Use of modulated stimulus to improve detection sensitivity for s

Optics: measuring and testing – Refraction testing – Prism engaging specimen
Patent

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Use of optical diffraction elements in detection methods

Optics: measuring and testing – By dispersed light spectroscopy – With sample excitation
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Use of optical spectrometry to evaluate the condition of used mo

Optics: measuring and testing – Oil testing
Patent

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Use of scanning beam for differential evaluation of adjacent...

Optics: measuring and testing – Of light reflection
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Use of scattered and/or transmitted light in determining...

Optics: measuring and testing – Of light reflection
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Use of scatterometry as a control tool in the manufacture of...

Optics: measuring and testing – Dimension
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User-worn rangefinder system and methods

Optics: measuring and testing – Range or remote distance finding – With photodetection
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User-worn rangefinder system and methods

Optics: measuring and testing – Range or remote distance finding – With photodetection
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Using a 2D displacement sensor to derive 3D displacement...

Optics: measuring and testing – Position or displacement
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Using a fixed-frequency of oscillation in an FTS system to...

Optics: measuring and testing – By light interference – Spectroscopy
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Using a fixed-frequency oscillation in a dispersive...

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
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Using a fixed-frequency oscillation in a dispersive...

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
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Using a laser beam to indicate roller wear

Optics: measuring and testing – Inspection of flaws or impurities
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Using position-sensitive detectors for wavelength determination

Optics: measuring and testing – By light interference – Having partially reflecting plates in series
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Using scatterometry for etch end points for dual damascene...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Using special visibility materials proximate candidate...

Optics: measuring and testing – Inspection of flaws or impurities – Transparent or translucent material
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