Use of laser reflection pickup unit for detection of small...

Details Use of laser reflection pickup unit for detection of small... Use of laser reflection pickup unit for detection of small...

2007-11-13

2007-11-13

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S484000, C356S511000, C356S445000, C369S099000

Reexamination Certificate

active

10975148

ABSTRACT:
A method and apparatus for detecting stray particles upon a relatively smooth surface by measuring the amount of collimated light reflected from the surface from clear areas of the surface and from particles resting on the surface. Optical pick-up units similar to those used in DVD's and CD's can be used. A method for detecting defective depressions is also covered.

REFERENCES:
patent: 5351229 (1994-09-01), Brezoczky et al.
patent: 5519497 (1996-05-01), Hubble et al.
patent: 5687297 (1997-11-01), Coonan et al.
patent: 5875029 (1999-02-01), Jann et al.
patent: 5883714 (1999-03-01), Jann et al.
patent: 6069624 (2000-05-01), Dash et al.

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