4. Optics: measuring and testing
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Particle detection on a patterned or bare wafer surface

Optics: measuring and testing – By light interference – For dimensional measurement
Patent

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Particle detection on patterned wafers and the like

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Patent

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Particle detection system

Optics: measuring and testing – For size of particles – By particle light scattering
Patent

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Particle detection system and method employing an upconversion l

Optics: measuring and testing – By particle light scattering – With photocell detection
Patent

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Particle detection system employing a subsystem for collecting s

Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent

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Particle detection system implemented with a mirrored...

Optics: measuring and testing – By particle light scattering – With photocell detection
Reexamination Certificate

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Particle detection system implemented with an immersed...

Optics: measuring and testing – By particle light scattering – With photocell detection
Reexamination Certificate

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Particle detection system implemented with an immersed...

Optics: measuring and testing – By particle light scattering – With photocell detection
Reexamination Certificate

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Particle detection system utilizing an inviscid flow-producing n

Optics: measuring and testing – By particle light scattering – With photocell detection
Patent

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Particle detection system with coincident detection

Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent

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Particle detection system with reflective line-to-spot collector

Optics: measuring and testing – By monitoring of webs or thread – For flaws or imperfections
Patent

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Particle detector

Optics: measuring and testing – By particle light scattering – With photocell detection
Reexamination Certificate

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Particle detector

Optics: measuring and testing – Miscellaneous
Reexamination Certificate

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Particle detector for rough surfaces

Optics: measuring and testing – For optical fiber or waveguide inspection
Patent

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Particle diameter distribution measurement apparatus and...

Optics: measuring and testing – For size of particles – By particle light scattering
Reexamination Certificate

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Particle diameter measuring apparatus

Optics: measuring and testing – For size of particles
Reexamination Certificate

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Particle diameter measuring apparatus

Optics: measuring and testing – For size of particles
Reexamination Certificate

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Particle diameter measuring device

Optics: measuring and testing – For size of particles – By particle light scattering
Patent

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Particle dispersion determinator

Optics: measuring and testing – Of light reflection
Reexamination Certificate

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Particle evaluator

Optics: measuring and testing – Refraction testing – Prism engaging specimen
Patent

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