Particle detection system employing a subsystem for collecting s

Details Particle detection system employing a subsystem for collecting s Particle detection system employing a subsystem for collecting s

1995-03-31

1997-02-18

Rosenberger, Richard A.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

G01N 2188

Patent

active

056045859

ABSTRACT:
Light scattered from illuminated spot on a patterned wafer is first passed through a di-electric filter and then by an optical fiber bundle to a detector. The di-electric filter controls the aperture of the light that is passed to a desired azimuth angle and the optical fiber further limits the aperture.

REFERENCES:
patent: 3409374 (1968-11-01), McPherson
patent: 3549264 (1970-12-01), Christie
patent: 3986778 (1976-10-01), Mathisen et al.
patent: 4084909 (1978-04-01), Mathisen et al.
patent: 4402607 (1983-09-01), McVay et al.
patent: 4441124 (1984-04-01), Heebner et al.
patent: 4541715 (1985-09-01), Akiyama et al.
patent: 4601576 (1986-07-01), Galbraith
patent: 4707134 (1987-11-01), McLachlan et al.
patent: 4804271 (1989-02-01), Cammann
patent: 4898471 (1990-02-01), Stonestrom et al.
patent: 5146082 (1992-09-01), Abe
patent: 5214494 (1993-05-01), Inaba et al.
patent: 5288992 (1994-02-01), Fohl
patent: 5317380 (1994-05-01), Allemand

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