4. Optics: measuring and testing
  5. Inspection of flaws or impurities
  6. Surface condition
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Systems and methods for providing illumination of a specimen...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Systems and methods for simultaneous or sequential...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Systems configured to inspect a wafer

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Systems for inspecting wafers and reticles with increased...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Systems for inspection of patterned or unpatterned wafers...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Systems, circuits and methods for extending the detection...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Systems, circuits and methods for reducing thermal damage...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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