Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2005-07-14
2008-08-19
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237200, C356S237600, C356S213000
Reexamination Certificate
active
07414715
ABSTRACT:
Inspection systems, circuits and methods are provided to enhance defect detection by addressing anode saturation as a limiting factor of the measurement detection range of a photomultiplier tube (PMT) detector. In accordance with one embodiment of the invention, a method for inspecting a specimen includes directing light to the specimen and detecting light scattered from the specimen. The step of detecting may include monitoring an anode current of the PMT detector, and detecting features, defects or light scattering properties of the specimen using the anode current until the anode current reaches a predetermined threshold. Thereafter, the method may use a dynode current of the PMT for detecting the features, defects or light scattering properties of the specimen.
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Romanovsky Anatoly
Slobodov Alexander
Wolters Christian H.
Alli Iyabo S
Baker & McKenzie LLP
KLA-Tencor Technologies Corp.
Toatley , Jr. Gregory J.
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