Reflective film thickness measurement method

Details Reflective film thickness measurement method Reflective film thickness measurement method

2008-08-27

2011-11-15

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

Dimension

Thickness

C250S559270, C250S559280, C356S632000, C356S445000, C702S170000

Reexamination Certificate

active

08059282

ABSTRACT:
A reflective film thickness measurement method includes reading an original spectral image of a thin film measured by a broadband light source passing through a measurement system, transforming the original spectral image into a broadband reflectance wavelength function and then into a broadband frequency-domain function, dividing the broadband frequency-domain function by a single-wavelength frequency-domain function to obtain an ideal frequency-domain function, inverse-transforming the ideal frequency-domain function into an ideal reflectance wavelength function, and performing a curve fitting on the ideal reflectance wavelength function and a reflectance wavelength thickness general expression, so as to obtain a thickness of the thin film. A spectral image spatial axis direction processing method is performed to eliminate optical aberration in a deconvolution manner, so as to obtain spectral images of high spatial resolution.

REFERENCES:
patent: 5305239 (1994-04-01), Kinra
patent: 7869057 (2011-01-01), De Groot
patent: 2006/0077385 (2006-04-01), Wang et al.

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