Resolution enhanced optical metrology

Details Resolution enhanced optical metrology Resolution enhanced optical metrology

2007-09-25

2007-09-25

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

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C356S601000, C356S625000, C250S559190, C250S559220, C250S559240

Reexamination Certificate

active

10447609

ABSTRACT:
A resolution enhanced optical metrology system to examine a structure formed on a semiconductor wafer includes a source configured to direct an incident beam at the structure through a coupling element. The coupling element is disposed between the source and the structure with a gap having a gap height defined between the coupling element and the structure.

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