Integrated circuit profile value determination

Details Integrated circuit profile value determination Integrated circuit profile value determination

2005-01-11

2005-01-11

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

Dimension

Width or diameter

C356S237500, C438S007000, C438S016000, C702S189000, C700S121000

Reexamination Certificate

active

06842261

ABSTRACT:
A profile parameter value is determined in integrated circuit metrology by: a) determining a diffraction signal difference based on a measured diffraction signal and a previously generated diffraction signal; b) determining a first profile parameter value based on the previously generated diffraction signal; c) determining a first profile parameter value change based on the diffraction signal difference; d) determining a second profile parameter value based on the first profile parameter value change; e) determining a second profile parameter value change between the first and second profile parameter values; f) determining if the second profile parameter value change meets one or more preset criteria; and g) when the second profile parameter value change fails to meet the one or more preset criteria, iterating c) to g) using as the diffraction signal difference in the iteration of step c), a diffraction signal difference determined based on the measured diffraction signal and a diffraction signal for the second profile parameter value previously determined in step d), and as the first profile parameter value in the iteration of step e), the second profile parameter value previously determined in step d).

REFERENCES:
patent: 6609086 (2003-08-01), Bao et al.
patent: 6660542 (2003-12-01), Stirton
patent: 6721691 (2004-04-01), Bao et al.
patent: 6775015 (2004-08-01), Bischoff et al.
patent: 6785009 (2004-08-01), Stirton et al.
patent: 20020113966 (2002-08-01), Shchegrov et al.
patent: 20030187604 (2003-10-01), Drege et al.
patent: 20040017574 (2004-01-01), Vuong et al.
patent: 20040090629 (2004-05-01), Drege et al.

Affiliated with

Also associated with

Rating

Integrated circuit profile value determination does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Integrated circuit profile value determination, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integrated circuit profile value determination will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3422650