Inspection apparatus and method of inspection

Details Inspection apparatus and method of inspection Inspection apparatus and method of inspection

2008-01-01

2008-01-01

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Dimension

C356S628000

Reexamination Certificate

active

11125322

ABSTRACT:
An inspection apparatus, comprising; an illumination system configured to provide an illumination beam for irradiating a target; a first detection system configured to detect radiation scattered from the target in a non-zero order diffraction direction; and the detection system comprises a dispersive element for dispersion of the radiation scattered from the target in the non-zero order diffraction direction and a radiation sensitive device constructed and arranged to measure the intensity of the radiation dispersed by the dispersive element.

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