Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2005-08-02
2005-08-02
Turner, Samuel A. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
06924898
ABSTRACT:
An interferometry method including: i) forming an optical interference image by combining different portions of an optical wave front reflected from multiple surfaces; ii) recording an interference signal at different locations of the optical interference image in response to varying a property of the optical wave front that causes pairs of the multiple surfaces that have different optical path separations to contribute differently to the interference signal; iii) transforming the interference signal for at least one of the locations to produce a spectrum having a peak at a spectral coordinate corresponding to each pair of the multiple surfaces; and iv) identifying the spectral coordinate of the peak corresponding to a selected pair of the multiple surfaces.
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Fish & Richardson P.C.
Lyons Michael A.
Turner Samuel A.
Zygo Corporation
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