Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2007-09-11
2007-09-11
Lee, Hwa (Andrew) (Department: 2886)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
10946690
ABSTRACT:
A frequency-shifting interferometer gathers intensity data from a set of interference patterns produced at different measuring beam frequencies. A periodic function is matched to the intensity data gathered from the set of interference patterns over a corresponding range of measuring beam frequencies. Localized correlations involving phase offsets between the interfering portions of the measuring beam are used to inform a determination of a rate of phase change with measuring beam frequency corresponding to the optical path length difference between the interfering beam portions.
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Kulawiec Andrew
Marron Joseph C.
McClimans Don
Tronolone Mark J.
Corning Incorporated
Lee Hwa (Andrew)
Schaeberle Timothy M.
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