Real time telecentricity measurement

Details Real time telecentricity measurement Real time telecentricity measurement

2011-08-16

2011-08-16

Chowdhury, Tarifur R (Department: 2886)

Optics: measuring and testing

By alignment in lateral direction

With light detector

Reexamination Certificate

active

07999939

ABSTRACT:
Systems and methods are provides for measuring and correcting for a given telecentricity in a lithographic apparatus. A radiation beam is partitioned into a plurality of beams, each of which is modulated using an array of individually controllable elements and projected onto a portion of a substrate through a projection system. A set of alignment beams is transmitted simultaneously on paths similar to those traversed by the plurality of radiation beams, and a corresponding set of sensors respectively measures an angle and a position of the set of alignment beams proximate to an entrance of the projection system. An assembly of telecentricity control mirrors (TCM) adjusts appropriate ones of the plurality of radiation beams in response to the measurement to correct for any detected telecentricity errors.

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English translation of Japanese Notification of Reasons for Refusal directed to related Japanese Patent Application No. 2008-208860, Japanese Patent Office, mailed Apr. 26, 2011; 3 pages.

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