Device for and method of aligning two bodies

Details Device for and method of aligning two bodies Device for and method of aligning two bodies

1982-10-22

1985-11-19

Rosenberger, R. A.

Optics: measuring and testing

By alignment in lateral direction

With light detector

356401, G01B 1100

Patent

active

045538450

ABSTRACT:
An alignment apparatus for aligning a mask having a first mark comprising first mark elements and a wafer having a second mark comprising second mark elements different in width from the first mark elements, comprises a moving mechanism for moving the wafer, a sensor for detecting the first and second marks and putting out a detection signal stream, a signal processing circuit for receiving the detection signal stream, discriminating between the first mark elements and the second mark elements in accordance with their respective pulse widths and creating a discrimination signal and creating a spacing signal regarding a plurality of spacings between the first mark elements and the second mark elements, and a drive circuit for driving the moving mechanism in response to the discrimination signal and the spacing signal. When the first and second mark elements overlap each other or come close to each other and the signals of the two elements cannot be separated, the wafer is moved by a predetermined amount, whereafter detection of the marks is again effected.

REFERENCES:
patent: 3758214 (1973-09-01), Mangelsdorf
patent: 4167677 (1979-09-01), Suzki
patent: 4170418 (1979-10-01), Aiuchi et al.
patent: 4408885 (1983-10-01), Johannsmeier et al.
Taylor, F. M., "Using a Laser Micrometer for Precision Control of Wire Diameter and Position on a CV Line", Proceedings of the 13th 23rd International Wire and Cable Symposium, Atlantic City, N.J., (Dec. 3-5, 1974).

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