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Fiber based MEMS

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate

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Fibrous micro-composite material

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Flexure design for a fast steering scanning mirror

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Patent

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Free-space optical wavelength routing element based on...

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Galvano mirror unit

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Galvano-mirror

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Gimbal with orbiting mirror

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Gyrating programmable scanner

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Patent

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Hidden flexure ultra planar optical routing element

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Hidden micromirror support structure

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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High bandwidth steering mirror

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Patent

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High efficiency electromagnetic coil apparatus and method

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Patent

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High fill-factor bulk silicon mirrors

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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High speed MEMS device

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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High-speed light beam deflector

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Patent

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Image forming apparatus

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Image-wise exposure apparatus

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Patent

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Imaging apparatus including optical scanning device with...

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Induced resonance comb drive scanner

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Innovative deformable mirror actuator configuration

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Patent

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